Bottom Clipped Stud-Socket Assemblies for Dielectric Etch Chamber Electrodes
AssigneeLam Research Corporation
InventorsGordon Peng, I-Chi Lin
Life of this patent
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Abstract
A stud-socket assembly includes: a stud pin having a head portion, a main body, and a neck portion that connects the head portion to the main body; a socket having a cylindrical interior volume, and having an upper opening through which the stud pin is disposed, the upper opening having an inner diameter that is less than the outer diameter of the head portion of the stud pin by at least 0.005 inch; a plurality of Belleville washers that circumferentially surround the main body of the stud pin; a retainer attached to the second end of the main body of the stud pin, the retainer configured to retain the plurality of Belleville washers within the cylindrical interior volume of the socket.
Claims20
A stud-socket assembly for connecting an upper electrode or annular shroud to a backing plate in a plasma process chamber, comprising:
- a stud pin having a head portion, a main body, and a neck portion that connects the head portion to the main body;
- wherein the neck portion being a cylindrical portion having a first diameter;
- wherein the main body being substantially cylindrically shaped at a second diameter that is greater than the first diameter, and having a shoulder at a first end that connects to the neck portion, and a second end opposite the first end;
- wherein the head portion having an outer diameter that is greater than the second diameter;
- a socket having a cylindrical interior volume, and having an upper opening through which the stud pin is disposed, the upper opening having an inner diameter that is less than the outer diameter of the head portion of the stud pin by at least 0.005 inch;
- a plurality of Belleville washers that circumferentially surround the main body of the stud pin;
- a retainer attached to the second end of the main body of the stud pin, the retainer configured to retain the plurality of Belleville washers within the cylindrical interior volume of the socket.
A stud-socket assembly for connecting an upper electrode or annular shroud to a backing plate in a plasma process chamber, comprising:
- a stud pin having a head portion, a main body, and a neck portion that connects the head portion to the main body;
- wherein the neck portion being a cylindrical portion having a first diameter;
- wherein the main body being substantially cylindrically shaped at a second diameter that is greater than the first diameter, and having a first end that connects to the neck portion, and a second end opposite the first end;
- wherein the head portion having an outer diameter that is greater than the second diameter;
- a socket having a cylindrical interior volume, and having an upper opening through which the stud pin is disposed, the upper opening having an inner diameter that is less than the outer diameter of the head portion of the stud pin by at least 0.005 inch;
- a plurality of Belleville washers that circumferentially surround the main body of the stud pin;
- wherein the socket having a lower opening, an inner diameter of the lower opening being greater than an outer diameter of the Belleville washers;
- a retainer attached to the second end of the main body of the stud pin, the retainer configured to retain the plurality of Belleville washers within the cylindrical interior volume of the socket.
Dependencies are inferred from the claim text.