Electron Microscope

Abstract

To improve the performance of an electron microscope. As a section for improving the performance of an electron microscope, an electron microscope is used that includes: a sample stage; a first cold finger arranged on an upstream side of an optical axis with respect to the sample stage; a second cold finger arranged on a downstream side of the optical axis with respect to the first cold finger with the sample stage interposed therebetween; and a movable mechanism configured to move the first cold finger and the second cold finger in an insertion and removal direction with respect to the optical axis. Here, the movable mechanism is configured to change a solid angle at which a sample placement portion of the sample stage is covered by one or both of the first cold finger and the second cold finger.

Dependencies are inferred from the claim text.