US 2026/0269170 A1 · ABERRATION CORRECTOR, CHARGED PARTICLE BEAM DEVICE INCLUDING SAME, AND CONTROL METHOD FOR CONTROLLING SAME

Abstract

An aberration corrector comprising a transfer lens disposed between a first multipole and a second multipole to control fourth-order coma aberration, includes: a first deflector, wherein the first and second multipoles generate a multipole field including a hexapole component, the first deflector adjusting at least one of: (i) the distance between the charged particle beam incident on the first multipole and the optical axis, and (ii) the azimuth angle of the beam incident on the first multipole; a second deflector adjusts at least one of: (i) the angle between the charged particle beam incident on an objective lens and the optical axis, and (ii) the azimuth angle of the beam incident on the objective lens; and a control unit configured to drive the first and second deflectors such that second-order coma aberration (B2) induced by the first deflector is at least partially cancelled by that induced by the second deflector.

Claims15

Dependent claims

An aberration corrector in which a transfer lens is disposed between a first multipole and a second multipole, each of the first multipole and the second multipole forming a multipole field including a component of a hexapole field, the aberration corrector comprising:

a first deflector configured to control at least one of a distance between a charged particle beam incident on the first multipole and an axis of an optical system and an azimuth angle of the charged particle beam incident on the first multipole;
a second deflector configured to control at least one of a slope between a charged particle beam incident on an objective lens and the axis of the optical system and an azimuth angle of the charged particle beam incident on the objective lens;
and
a control unit configured to control the first deflector and the second deflector, wherein
the control unit executes first control executed on the first deflector and second control executed on the second deflector such that at least a part of a second-order coma aberration caused by the first control is canceled by a second-order coma aberration caused by the second control.

2 more elements

a first deflector configured to control at least one of a distance between a charged particle beam incident on the first multipole and an axis of an optical system and an azimuth angle of the charged particle beam incident on the first multipole;
a second deflector configured to control at least one of a slope between a charged particle beam incident on an objective lens and the axis of the optical system and an azimuth angle of the charged particle beam incident on the objective lens;
a third deflector configured to control at least one of a distance between a charged particle beam incident on the second multipole and the axis of the optical system and an azimuth angle of the charged particle beam incident on the second multipole;
and
a control unit configured to control the first deflector, the second deflector, and the third deflector, wherein
the control unit executes first control executed on the first deflector, second control executed on the second deflector, and third control executed on the third deflector such that at least a part of coma aberrations caused by at least two of the first control, the second control, and the third control is canceled.

3 more elements

Dependencies are inferred from the claim text.

Aberration corrector, charged particle beam device including same, and control method for controlling same

Life of this patent

Aberration corrector, charged particle beam device including same, and control method for controlling same

Life of this patent

Abstract

Claims15