US 2026/0269099 A1 · LIGHT SOURCE APPARATUS AND CONTROL METHOD OF LIGHT SOURCE APPARATUS

Abstract

A light source apparatus according to the present disclosure includes: a rotary body which includes a target holding unit configured to hold a target material that serves as a plasma source configured to generate plasma and a shaft portion connected to the target holding unit and which rotates around a rotational axis that passes through the shaft portion; a shaft support portion which includes a magnetic force generating unit configured to apply a magnetic force to the shaft portion and which is configured to support the shaft portion; and a control unit configured to control the magnetic force generating unit, in which the shaft support portion is configured to rotatably support the shaft portion in a state where the shaft portion is levitated by the magnetic force via the magnetic force generating unit.

Claims22

Dependent claims

A light source apparatus, comprising:

a rotary body which includes a target holding unit configured to hold a target material that serves as a plasma source configured to generate plasma and a shaft portion connected to the target holding unit and which rotates around a rotational axis that passes through the shaft portion;
a shaft support portion which includes a magnetic force generating unit configured to apply a magnetic force to the shaft portion and which is configured to support the shaft portion;
and
a control unit configured to control the magnetic force generating unit,
wherein the shaft support portion is configured to rotatably support the shaft portion in a state where the shaft portion is levitated by the magnetic force via the magnetic force generating unit, and
wherein the control unit is configured to displace the shaft portion by controlling the magnetic force generating unit.

3 more elements

A control method of a light source apparatus,

the light source apparatus including:
a rotary body which includes a target holding unit that holds a target material that serves as a plasma source that generates plasma and a shaft portion connected to the target holding unit and which rotates around a rotational axis that passes through the shaft portion;
a shaft support portion which includes a magnetic force generating unit that applies a magnetic force to the shaft portion and which supports the shaft portion;
and
a control unit which controls the magnetic force generating unit,
the control method comprising the steps of:
the shaft support portion rotatably supporting the shaft portion in a state where the shaft portion is levitated by the magnetic force via the magnetic force generating unit;
and
the control unit displacing the shaft portion by controlling the magnetic force generating unit.

6 more elements

Dependencies are inferred from the claim text.

Light source apparatus and control method of light source apparatus

Life of this patent

Light source apparatus and control method of light source apparatus

Life of this patent

Abstract

Claims22