Pattern matching method
AssigneeTasmit, Inc.
InventorYuji MIURA
Life of this patent
Estimating the term…
Abstract
A pattern matching method includes: calculating pattern densities in inspection areas (A1 to A10) from design data; dividing the pattern densities into density groups (PG1 to PG3) according to numerical values of the pattern densities; generating images of the inspection areas by a scanning electron microscope (1); performing pattern matching between a pattern on each of the images and a corresponding CAD pattern; calculating image shift amounts corresponding to the inspection areas (A1 to A10) based on results of the pattern matching; dividing the inspection areas (A1 to A10) into area groups (AG1 to AG3) corresponding to the density groups (PG1 to PG3); calculating correction amounts (C1 to C3) corresponding to the area groups (AG1 to AG3).
Claims8
A pattern matching method comprising:
- setting a plurality of inspection areas in a patterned surface of a workpiece;
- calculating pattern densities in the plurality of inspection areas from design data of patterns of the workpiece;
- dividing the pattern densities into a plurality of density groups according to numerical values of the pattern densities;
- generating images of the plurality of inspection areas by a scanning electron microscope;
- performing pattern matching between a pattern on each of the images and a corresponding CAD pattern;
- calculating a plurality of image shift amounts corresponding to the plurality of inspection areas based on results of the pattern matching;
- dividing the plurality of inspection areas into a plurality of area groups corresponding to the plurality of density groups;
- calculating a plurality of correction amounts corresponding to the plurality of area groups based on the image shift amounts corresponding to the inspection areas belonging to the respective area groups;
- and
- generating correlation data indicating correlation between the plurality of density groups and the plurality of correction amounts.
A pattern matching method comprising:
- setting a plurality of inspection areas in a patterned surface of a workpiece;
- calculating pattern densities in the plurality of inspection areas from design data of patterns of the workpiece;
- dividing the pattern densities into a plurality of density groups according to numerical values of the pattern densities;
- generating images of the plurality of inspection areas by a scanning electron microscope;
- performing pattern matching between a pattern on each of the images and a corresponding CAD pattern;
- calculating a plurality of X-direction image shift amounts and a plurality of Y-direction image shift amounts corresponding to the plurality of inspection areas based on results of the pattern matching;
- dividing the plurality of inspection areas into a plurality of area groups corresponding to the plurality of density groups;
- calculating a plurality of X-direction correction amounts corresponding to the plurality of area groups based on the plurality of X-direction image shift amounts corresponding to the inspection areas belonging to the respective area groups;
- calculating a plurality of Y-direction correction amounts corresponding to the plurality of area groups based on the plurality of Y-direction image shift amounts corresponding to the inspection areas belonging to the respective area groups;
- generating X-direction correlation data indicating correlation between the plurality of density groups and the plurality of X-direction correction amounts;
- and
- generating Y-direction correlation data indicating correlation between the plurality of density groups and the plurality of Y-direction correction amounts.
Dependencies are inferred from the claim text.