Positioning device

A positioning device comprising:

• a target object moving unit having at least one electric actuator that is configured to move a target object;
• a target object position measuring unit configured to measure a moved position of the target object;
• and
• a control unit
• configured to output, to the target object moving unit, a position control signal for moving the target object toward a target position, and
• configured to acquire a measured position of the target object measured by the target object position measuring unit,
• the control unit being configured to carry out
• a first calibration control for calculating a reference calibration value of the position control signal on the basis of the target position and the measured position, and
• a second calibration control for
• outputting, to the target object moving unit, a calibrated position control signal obtained by calibrating the position control signal using an addition-side provisional calibration value obtained by adding a prescribed value to the reference calibration value, and acquiring, from the target object position measuring unit, an addition-side calibration measurement position obtained by measuring the moved position of the target object moved by the target object moving unit on the basis of the calibrated position control signal,
• outputting, to the target object moving unit, a calibrated position control signal obtained by calibrating the position control signal using a subtraction-side provisional calibration value obtained by subtracting a prescribed value from the reference calibration value, and acquiring, from the target object position measuring unit, a subtraction-side calibration measurement position obtained by measuring the moved position of the target object moved by the target object moving unit on the basis of the calibrated position control signal, and
• selecting, from the addition-side calibration measurement position and the subtraction-side calibration measurement position, a calibration measurement position that has a smaller difference from the target position, and setting, as a new reference calibration value, a provisional calibration value used for calculation of a calibrated position control signal that moved the target object to the selected calibration measurement position.