Alignment method and associated alignment and lithographic apparatuses
AssigneeASML Netherlands B.V.
InventorsNick Franciscus Wilhelmus THISSEN, Simon Gijsbert Josephus MATHIJSSEN
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Abstract
Disclosed is a method for determining at least one set of correction weights to correct metrology data is disclosed. The method comprises obtaining first and second metrology data relating respectively to a first layer and a second layer. Each of the first and second metrology data is fitted to a model for representing the metrology data to determine a first set of fit residuals and second set of fit residuals. The at least one set of correction weights as at least one set of correction weights are determined to minimize a difference between said first set of fit residuals and said second set of fit residuals.
Claims21
-20. (canceled)
A method for determining at least one set of correction weights to correct metrology data, the method comprising:
- obtaining first metrology data relating to a first set of illumination settings of measurement radiation used to perform a measurement of a first layer;
- fitting the first metrology data to a model for representing the metrology data and determining a first set of fit residuals as the residuals of the first metrology data with respect to the model;
- obtaining second metrology data relating to a second set of illumination settings of measurement radiation used to perform a measurement of a second layer, the second set of illumination settings comprising a plurality of illumination settings, where each illumination setting comprises a different wavelength, polarization or combination thereof;
- fitting the second metrology data to a model for representing the metrology data and determining a second set of fit residuals as the residuals of the second metrology data with respect to the model;
- and
- determining the at least one set of correction weights such that it minimizes a difference between the first set of fit residuals and the second set of fit residuals.
Dependencies are inferred from the claim text.