Reflection-based phase contrast microscope system
AssigneeApplied Materials Israel Ltd.
InventorsAmir SHOHAM, Ilan Matan HURWITZ
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Abstract
A reflective phase contrast microscope system, and a corresponding inspection system are described. The phase contrast microscope comprises an illumination channel, a collection channel, a space variant beam splitting unit and an objective lens arrangement. The space variant beam splitting unit comprises a pattern of transmitting regions and at least one partly reflecting region. Wherein the partly reflecting regions have a form that, when reflecting light toward the objective lens or coming from the objective lens, the reflected light pattern forms a ring illumination pattern.
Claims20
An inspection system comprising a reflective phase contrast microscope system and a sample mount;
- the reflective phase contrast microscope system comprising an illumination channel, a collection channel, a space variant beam splitting unit and an objective lens arrangement, and is configured for imaging one or more samples positioned on the sample mount;
- wherein the space variant beam splitting unit comprises a pattern of transmitting regions and at least one partly reflecting region;
- wherein the at least one partly reflecting region has a form that, when reflecting light toward the objective lens or coming from the objective lens, the reflected light pattern forms a ring illumination pattern.
A reflective phase contrast microscope system comprising an illumination channel, a collection channel, a space variant beam splitting unit and an objective lens arrangement;
- the space variant beam splitting unit comprises a pattern of transmitting regions and at least one partly reflecting region;
- wherein the at least one partly reflecting region has a form that, when reflecting light toward the objective lens or coming from the objective lens, the reflected light pattern forms a ring illumination pattern.
Dependencies are inferred from the claim text.