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US 2026/0267124 A1Published application
Optical unit with continuous phase and amplitude control
AssigneeApplied Materials Israel Ltd.
InventorsAmir SHOHAM, Ilan Matan HURWITZ
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Abstract
The present disclosure describes an optical unit comprising two or more controllable polarization dependent phase affecting elements, each having a ring-shaped phase affecting region surrounded by transmitting regions, and at least one polarization analyzer. The two or more controllable polarization dependent phase affecting elements and the at least one polarization analyzer are arranged along a common path of light propagation through the optical unit providing control over phase and attenuation level of light passing through the optical unit.
Claims13
An optical unit comprising:
- two or more controllable polarization dependent phase affecting elements, each having a ring-shaped phase affecting region surrounded by transmitting regions;
- and at least one polarization analyzer;
- wherein the two or more controllable polarization dependent phase affecting elements and the at least one polarization analyzer being arranged along a common path of light propagation through the optical unit.
An optical unit comprising:
- a first rotatable plate and a second rotatable plate, each comprising a ring-shaped retarder region surrounded by optically transparent regions and at least one polarization analyzer arranged along a common path of propagation of light through the optical unit;′
- wherein the ring-shaped retarder regions are configured from a birefringent material having a fast axis and a slow axis;
- and
- wherein selected rotation angles of the first and second rotatable plates provide selected attenuation and phase shift of ring-shaped light components within a range of 2π phase variation and 100% amplitude attenuation of light passing through the optical unit.
1 more element
Dependencies are inferred from the claim text.