Back to results
US 2026/0267121 A1Published application
Self-Referencing Interferometric Microscope
AssigneeCamtek Ltd.
InventorsBoris Ferdman, Tomer Gilad
Life of this patent
Estimating the term…
Abstract
A self-referencing interferometric microscope uses near-common-path, common component beam separators to produce two beams that illuminate the sample at different angles. Two return beams collected from the sample interfere at the image plane to produce an interferometric image of the sample comprising fringes across the image. The image can be processed to determine the topography of the sample.
Claims14
An optical assembly for a self-referencing interferometric microscope, the optical assembly comprising:
- a first beam separator to separate an illumination beam of the self-referencing interferometric microscope into a first optical beam having a first central axis and a second optical beam having a second central axis, wherein:
- the first optical beam travels along a first optical path forming a first loop within the first beam separator,
- the second optical beam travels along a second optical path forming a second loop within the first beam separator,
- the first optical beam and the second optical beam interact only with common optical components in the first beam separator, and
- the first central axis is laterally offset by a first separation distance S1 from the second central axis when the first optical beam and the second optical beam exit the first beam separator;
- and
- an objective lens, wherein the objective lens is arranged to:
- receive the first optical beam and the second optical beam that have exited the first beam separator,
- focus the first optical beam onto a sample at a first angle, and
- focus the second optical beam onto the sample at a second angle that is different from the first angle.
7 more elements
Dependencies are inferred from the claim text.