Method of manufacture of a metasurface
AssigneeMax-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
InventorStuart S.P. PARKIN
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Abstract
The present invention relates to a new method for making metasurfaces comprising liquid gating. Exemplary metasufaces include those formed from VO2, WO3, MoO3, SrCoO3 or SrTiO3 as substrate materials. The inventive metasurfaces can be used as a planar lens, vortex generator, beam deflector, an axicon, inter alia. The inventive methods allow metasurfaces to be formed readily on curved or flexible surfaces.
Claims25
A method for chemically transforming a surface of a substrate into a metasurface which is a plasmonic array comprising the steps of:
- I. providing a surface on a substrate which exhibits at least two distinct measurable states of an optical property and which can stably but reversibly be transitioned from
- i. a first state of the optical property into at least
- ii. one second state of the optical property which is measurably distinct from the first state,
- by a change in a chemical composition of the surface of the substrate
- II. creating on the surface of the substrate at least one area
- i. outside of which the substrate is in the first state of the optical property, and
- ii. inside of which the substrate is in one of the at least one second state of the optical property,
- or
- iii. wherein the states of the optical property of the inside area and the outside area are inverted, and
- III. wherein step II further comprises defining and delineating a desired-to-be inside area on the surface of the substrate which is in the first state of the optical property via a resist cover layer and
- subsequently contacting the surface in the defined and delineated inside area with a liquid which reacts with the surface of the substrate material to form a chemical product that yields or brings about the transition into the at least one second state of the optical property within the inside area only,
- or
- wherein in step III the states of the optical property of the surface and the inside area are inverted and
- the substrate is WO3, MoO3, SrCoO3 or SrTiO3, with the metasurface comprising a metallic antennae array within an insulating matrix, and
- IV. removing the resist cover layer after completion of the transition.
A substrate comprising a metasurface, said substrate having at least one area that has been chemically transitioned, wherein said metasurface controls a wavefront of electromagnetic waves and the metasurface is formed by a process comprising the steps of:
- (I). providing a surface on a substrate which exhibits at least two distinct measurable states of an optical property and which can stably but reversibly be transitioned from
- (i) a first state of the optical property into
- (ii) an at least one second state of the optical property which is measurably distinct from the first state,
- by a change in the chemical composition of the surface of the substrate
- (II). creating on the surface of the substrate at least one area
- (i) outside of which the substrate is in the first state of the optical property, and
- (ii) inside of which the substrate is in one of the at least one second state of the optical property,
- or
- (iii) wherein the states of the optical property of the inside area and the outside area are inverted, and
- (III), wherein step (II) further comprises defining and delineating a desired-to-be inside area on the surface of the substrate which is in the first state of the optical property and
- subsequently contacting the surface in the defined and delineated inside area with a liquid which reacts with the surface of the substrate material to form a chemical product that yields or brings about the transition into the at least one second state of the optical property within the inside area only,
- or
- wherein in step (III) the states of the optical property of the surface and the inside area are inverted
- and the substrate is WO3, MoO3, SrCoO3 or SrTiO32, and the metasurface comprises a metallic antennae array within an insulating matrix.
A substrate comprising a metasurface, wherein the metasurface is a plasmonic array whose composition is contained entirely within a layer of the substrate, said metasurface having at least one area that has been chemically transitioned from an initial state of optical property to a measurably distinct at least second state of optical property, wherein said metasurface controls a wavefront of electromagnetic waves.
Dependencies are inferred from the claim text.