Readout design for charged particle counting detectors
AssigneeASML Netherlands B.V.
InventorsYongxin WANG, Steven Michael STUDULSKI
Life of this patent
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Abstract
A charged particle beam detector may include a plurality of sensing elements, each sensing element being connected to a dedicated array of signal detection cells. Each signal detection cell may include a solid state current controlling device configured to rapidly extract charge from the sensing element during a detection event. Each signal detection cell may further include a simplified architecture that automatically enables the next signal detection cell once a valid detection happens. The detection cell may store the detection signal until a controller is ready to read the signal out. Thus, each detection cell may be enabled in rapid succession to receive and store a signal with a simple and robust architecture.
Claims20
A non-transitory computer-readable medium that stores a set of instructions that is executable by at least one processor of an apparatus to cause the apparatus to perform a method comprising:
- enabling a first solid state current controlling device (SSCCD) of a first signal detection cell to be put into an on state in which the first SSCCD can conduct current from a charged particle sensing element of a charged particle counting detector;
- outputting a first current pulse from the charged particle sensing element in response to a first charged particle arriving at the charged particle sensing element, wherein the first current pulse triggers the first SSCCD to the on state;
- in response to the first SSCCD being triggered to the on state, conducting the first current pulse from an input to an output of the first SSCCD;
- and
- receiving a second enabling signal at a second signal detection cell comprising a second SSCCD, the second enabling signal being based on the first current pulse,
- wherein the second enabling signal enables the second SSCCD of the second signal detection cell to be put into the on state in which the second SSCCD can conduct current from the charged particle sensing element.
A charged particle counting detector, comprising:
- a charged particle sensing element configured to output a first current pulse in response to a first charged particle arriving at the charged particle sensing element;
- a first signal detection cell comprising a first solid state current controlling device (SSCCD) that is configured a) to be enabled, by a first enabling signal, to be put into an on state in which the first SSCCD can conduct current from the charged particle sensing element, b) to be triggered to the on state by the first current pulse, and c) to conduct the first current pulse to an output of the first SSCCD in response to the first SSCCD being triggered to the on state;
- and
- a second signal detection cell configured to receive a second enabling signal and comprising a second SSCCD that is configured to be enabled, by the second enabling signal, to be put into an on state in which the second SSCCD can conduct current from the charged particle sensing element.
A signal detection cell for a charged particle counting detector, comprising:
- an enable signal input configured to receive a first enabling signal to enable the signal detection cell to detect a charged particle arrival signal from a charged particle sensing element;
- an analog signal input configured to receive the charged particle arrival signal from the charged particle sensing element;
- an operation status output configured to output an operation status signal based on the charged particle arrival signal;
- and
- an enable signal output configured to output a second enabling signal to be provided to a further signal detection cell based on the charged particle arrival signal.
Dependencies are inferred from the claim text.