Transfer system and transfer method

A transfer method of a transfer system, the transfer system including

• a transfer module extending along a first direction;
• a plurality of processing modules connected to the transfer module and provided along a direction in which the transfer module extends;
• and
• a loader module connected to the transfer module and extending along a second direction orthogonal to the first direction, the method comprising:
• (A) conveying a carrier configured to accommodate a transfer target along a direction parallel to the second direction by a carrier conveyance line and placing the carrier on a load port provided in a main housing of the loader module;
• (B) after the (A), unloading the transfer target from the carrier placed on the load port, transferring the transfer target to a sub-housing formed separately from the main housing, the sub-housing being smaller than the main housing, and connected to the transfer module in the second direction of the main housing, and loading the transfer target into the transfer module;
• and
• (C) after the (B), transferring the transfer target loaded in the transfer module and transferring the transfer target to any one of the plurality of processing modules.