Pattern testing method, device, apparatus and medium for single die
AssigneeShenzhen Rayson Technology Co., Ltd.
InventorZi Liu
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AssigneeShenzhen Rayson Technology Co., Ltd.
InventorZi Liu
Estimating the term…
This application discloses a pattern testing method and a device, an apparatus, and a medium for a single die. The method comprises: when the first capacity to be tested of a single first die to be tested in a wafer to be tested is greater than a preset capacity threshold, obtaining a current first parameter-passing file; the first parameter-passing file comprises: first algorithm selection information and a preset difference; updating the first algorithm selection information based on a first capacity difference between the first capacity to be tested and the preset capacity threshold and the preset difference to obtain second algorithm selection information and an updated second parameter-passing file; determining and starting a target pattern testing algorithm from multiple different candidate pattern testing algorithms according to the second algorithm selection information.
A pattern testing method for a single die, comprising:
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