Test apparatus having probe card with optical test elements and related methods

A method comprising:

• transmitting a first optical test signal from a probe assembly to a first silicon photonic element of an integrated circuit (IC) die;
• transmitting a first electrical signal associated with the first optical test signal from the probe assembly to a first circuit structure of the IC die;
• generating a first optical signal by the first circuit structure based on the first optical test signal and the first electrical signal;
• and
• receiving the first optical signal by an optical receiver of the probe assembly.

A system, comprising:

• a test head;
• a probe card assembly in electrical communication with the test head, the probe card assembly including:
• a probe card;
• and
• a jig assembly mounted to the probe card;
• a first optical transmitter in electrical communication with the test head, the first optical transmitter being positioned in the probe card assembly;
• and
• a first optical fiber in optical communication with the first optical transmitter, the first optical fiber extending through the jig assembly.