Probe for use in a probe system for probing a superconductive circuit, method of probing and of manufacturing a probe

Abstract

The invention is directed at a probe for use in a probe system for probing a superconductive circuit including at least one quantum device, wherein the quantum device comprises a probe pad made of first material for enabling measuring of a parameter of the quantum device; wherein under cryogenic device operating conditions the first material is a superconductor, and wherein the probe is configured for probing the probe pad for performing said measuring, wherein the probe comprises a probe tip configured to be brought in contact with a contact surface of the probe pad; and wherein the probe tip, on a side thereof which is configured to be brought in contact with the contact surface of the probe pad, comprises on an outer layer which is made of a second material, which second material is same as the first material.

Dependencies are inferred from the claim text.