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US 2026/0266801 A1Published application
System for generating high-precision gas mixtures
AssigneeFederal Institute of Metrology
InventorsBernhard NIEDERHAUSER, Martin STALDER, Daniel SCHWALLER, Kevin AUDERSET
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Abstract
Embodiments of the present disclosure may comprise a system for generating high-precision gas mixtures, the system comprising a first part that may be temperature-controlled to a first temperature, comprising a first gas generator. Embodiments may also comprise one or more second gas generators. Embodiments may also comprise a second part that may be temperature-controlled to a second temperature and comprise a gas mixing assembly.
Claims20
A system for generating high-precision gas mixtures, the system comprising:
- a first part that is temperature-controlled to a first temperature, comprising:
- a first gas generator;
- and
- one or more second gas generators;
- a second part that is temperature-controlled to a second temperature, wherein said second temperature is higher than said first temperature, comprising:
- a mixing chamber, wherein said mixing chamber is temperature-controlled to said second temperature, further comprising:
- a first gas input port said first gas input port coupled to the output of said first gas generator by coated piping, wherein said coated piping is temperature-controlled to said first temperature;
- one or more second gas input ports, each coupled to the output of one of said one or more second gas generators by piping, wherein said piping is temperature-controlled to said first temperature;
- a gas-mixing assembly said gas mixing assembly comprising:
- a diffuser coupled to said first gas input port by coated piping;
- and
- one or more diffuser plates;
- a high-precision gas mixture output;
- and
- an exhaust gas mixture output.
12 more elements
Dependencies are inferred from the claim text.