Evaluation system of operation
AssigneeHitachi High-Tech Corporation
InventorsKatsutoshi MURAMATSU, Nobuaki NAKASU, Kohei SATO
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Abstract
An evaluation system of an operation including a plurality of steps on an object having a surface for which a predetermined level of cleanliness is required, in which the evaluation includes calculating a total sum of a sum of a plurality of operation times required for the respective plurality of steps, and a product of the sum of the operation times and a coefficient obtained in advance indicating a degree of an occurrence of a defect due to a foreign matter deteriorating the level of cleanliness of the surface in the plurality of steps after the operation based on an evaluation result on a degree of diffusion or adhesion of the foreign matter, and the calculated result is displayed or notified on a display.
Claims7
An evaluation system of an operation including a plurality of steps on an object having a surface for which a predetermined level of cleanliness is required, wherein
- the evaluation includes calculating a total sum of a sum of a plurality of operation times required for the respective plurality of steps, and a product of the sum of the operation times and a coefficient obtained in advance indicating a degree of an occurrence of a defect due to a foreign matter deteriorating the level of cleanliness of the surface in the plurality of steps after the operation based on an evaluation result on a degree of diffusion or adhesion of the foreign matter, and
- the calculated result is displayed or notified on a display.
Dependencies are inferred from the claim text.