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AssigneeHahn-Schickard-Gesellschaft FüR Angewandte Forschung E. V.
InventorsAlfons Dehé, Akash Gupta
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The invention relates to a thermal fluid sensor comprising a membrane which exhibits an aperture, a heating element and a temperature sensor. The heating element and the temperature sensor are positioned such that at least one property of a fluid flowing through the aperture can be measured based on the modulation of a heat flow between the heating element and the temperature sensor. The thermal fluid sensor exhibits a support structure which extends at least partially over the aperture at a vertical distance from the membrane, wherein the temperature sensor or the heating element is mounted on the support structure. In addition, the invention relates to a method for producing the thermal fluid sensor and a use of the thermal fluid sensor for measuring one or more properties of the fluid.
A thermal fluid sensor comprising a membrane having an aperture, a heating element and a temperature sensor positioned such that at least one property of a fluid flowing through the aperture is measurable based on the modulation of a heat flow between the heating element and the temperature sensor, wherein the thermal fluid sensor exhibits a support structure which extends at least partially over the aperture at a vertical distance from the membrane, wherein the temperature sensor or the heating element is mounted on the support structure.
Dependencies are inferred from the claim text.