Gas sensor
AssigneeFaradaIC Sensors GmbH
InventorsAlexey YAKUSHENKO, Ryan GUTERMAN
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Abstract
A microfabricated gas sensor for a target gas. The microfabricated gas sensor comprises: an electrolyte, a first electrode and a second electrode. The electrolyte is at least partly provided using photolithography. The first electrode is in contact with a first surface of the electrolyte and is for reducing or oxidising the target gas received through the electrolyte to produce target ions. The second electrode is in contact with a second surface of the electrolyte. With a potential difference applied between the first and second electrodes an amount of electrical current from the first electrode to the second electrode is indicative of at least one of: a concentration of the target gas at the first surface, or a partial pressure of the target gas at the first surface.
Claims20
A microfabricated gas sensor for a target gas, comprising:
- an electrolyte at least partly provided using photolithography;
- a first electrode, a surface of the first electrode in contact with a first surface of the electrolyte, the surface of the first electrode from 78.5 micrometres squared to 7,850 micrometres squared, and the first electrode for reducing or oxidising the target gas received through the electrolyte to produce target ions;
- and
- a second electrode, a surface of the second electrode in contact with a second surface of the electrolyte, and the surface of the second electrode (106) from 78.5 micrometres squared to 7,850 micrometres squared,
- wherein with a potential difference applied between the first and second electrodes an amount of electrical current between the first electrode and the second electrode is indicative of at least one of:
- a concentration of the target gas at the first surface, or a partial pressure of the target gas at the first surface.
A device comprising a microfabricated gas sensor comprising:
- an electrolyte at least partly provided using photolithography;
- a first electrode, a surface of the first electrode in contact with a first surface of the electrolyte, the surface of the first electrode from 78.5 micrometres squared to 7,850 micrometres squared, and the first electrode for reducing or oxidising the target gas received through the electrolyte to produce target ions;
- and
- a second electrode, a surface of the second electrode in contact with a second surface of the electrolyte, and the surface of the second electrode (106) from 78.5 micrometres squared to 7,850 micrometres squared,
- wherein with a potential difference applied between the first and second electrodes an amount of electrical current between the first electrode and the second electrode is indicative of at least one of a partial pressure of the target gas at the first surface.
A method of calibrating a plurality of microfabricated gas sensors, each microfabricated gas sensor of the plurality of microfabricated gas sensors respectively comprising:
- an electrolyte at least partly provided using photolithography;
- a first electrode, a surface of the first electrode in contact with a first surface of the electrolyte, the surface of the first electrode from 78.5 micrometres squared to 7,850 micrometres squared, and the first electrode for reducing or oxidising the target gas received through the electrolyte to produce target ions;
- and
- a second electrode, a surface of the second electrode in contact with a second surface of the electrolyte, and the surface of the second electrode from 78.5 micrometres squared to 7,850 micrometres squared,
- wherein with a potential difference applied between the first electrode and the second electrode an amount of electrical current between the first electrode and the second electrode is indicative of at least one of:
- a concentration of the target gas at the first surface, or a partial pressure of the target gas at the first surface.
Dependencies are inferred from the claim text.