Apparatuses and methods for x-ray spectroscopy
AssigneeMalvern Panalytical Limited
InventorsSander WEIJERS, Milen GATESHKI
Life of this patent
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Abstract
The invention provides an X-ray analysis apparatus and method for carrying out X-ray absorption spectroscopy, XAS, on a sample. The apparatus and method involve a position-sensitive X-ray detector. In some aspects, counting the number of X-ray photons arriving at the X-ray detector comprises correcting for charge sharing events in which an incident X-ray photon is detected at both the first detector segment and the second detector segment. It also comprises only counting X-ray photons having energies within predetermined energy range. In some aspects, the X-ray detector and the X-ray source are scanned over an angular range during the XAS measurement.
Claims15
An X-ray analysis apparatus for carrying out X-ray absorption spectroscopy on a sample, the X-ray analysis apparatus comprising:
- a wavelength selector arranged to receive an input X-ray beam and to output an output X-ray beam, wherein the output X-ray beam comprises a selection of wavelengths present in the input X-ray beam;
- an X-ray detector for detecting X-rays from the sample, the X-ray detector comprising a first detector segment and a second detector segment, each of the first detector segment and the second detector segment being configured to convert incoming X-ray photons into respective electrical pulses;
- one or more readout circuits, coupled to the X-ray detector;
- and
- a detection processor configured to process signals generated by the one or more readout circuits to count a number of X-ray photons arriving at the X-ray detector, wherein counting the number of X-ray photons arriving at the X-ray detector comprises correcting for charge sharing events in which an incident X-ray photon is detected at both the first detector segment and the second detector segment;
- wherein counting the number of X-ray photons arriving at the X-ray detector comprises counting X-ray photons having energies within a detection window corresponding to a first energy range and discounting X-ray photons having energies outside of the first energy range.
A method of carrying out X-ray absorption spectroscopy on a sample, the method comprising:
- receiving, from an X-ray detector, X-ray absorption spectroscopy intensity signals;
- and
- processing, by a detection processor, the X-ray absorption spectroscopy intensity signals to correct for charge sharing events, wherein the X-ray detector comprises a first detector segment and a second detector segment configured to convert incoming X-ray photons into respective electrical pulses.
Dependencies are inferred from the claim text.