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US 2026/0266643 A1Published application
Sensor device
AssigneeMmi Semiconductor Co., Ltd.
InventorsToshihiko NIMURA, Makoto KAMEI, Yasushi SHIMOMOTO
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Abstract
A sensor device includes a flow path-forming member including a first wall surface, a second wall surface facing the first wall surface, and a third wall surface facing the first wall surface. The first wall surface, the second wall surface, and the third wall surface define a first flow path, and the second wall surface is disposed at a position closer to the first wall surface than the third wall surface is in a second direction.
Claims18
A sensor device comprising:
- a flow path-forming member including a flow path, the flow path including:
- a first flow path extending from a first opening to a second opening in a first direction, and
- a second flow path branching from the first flow path and in which a detection portion of a sensor chip is disposed,
- wherein the flow path-forming member includes:
- a first wall surface formed continuously from an upstream side to a downstream side of a connection portion with the second flow path in the first direction,
- a second wall surface facing the first wall surface in a second direction perpendicular to the first direction, the second wall surface being disposed on the upstream side of the connection portion with the second flow path in the first direction, and
- a third wall surface facing the first wall surface in the second direction, the third wall surface being disposed on the downstream side of the connection portion with the second flow path in the first direction,
- wherein the first wall surface, the second wall surface, and the third wall surface define the first flow path, and
- wherein the second wall surface is disposed at a position closer to the first wall surface than the third wall surface is in the second direction.
6 more elements
A sensor device comprising:
- a flow path-forming member including a flow path, the flow path including:
- a first flow path extending from a first opening to a second opening in a first direction, and
- a second flow path branching from the first flow path and in which a detection portion of a sensor chip is disposed,
- wherein the first flow path includes:
- a flow rectifying portion disposed upstream of a connection portion between the first flow path and the second flow path, the flow rectifying portion being configured to rectify a flow of fluid flowing through the first flow path, and
- an inclined portion that is disposed upstream of the connection portion and is inclined toward a center of the first flow path when viewed in a thickness direction of the flow path-forming member, and
- wherein the flow rectifying portion has a first surface facing the inclined portion.
4 more elements
Dependencies are inferred from the claim text.