Furnace tube and control method therefor
AssigneeChangzhou S.C Exact Equipment Co., Ltd.
InventorsWei YI, Jinsheng Deng, Caozheng Li, Meishi Li, Jingdian Tan
Life of this patent
Estimating the term…
Abstract
Provided are a furnace tube and a control method therefor in the solar photovoltaic industry. The furnace tube includes an outer furnace tube, an inner furnace tube, an upper furnace cover, a lower furnace door, and a rotating device. An upper end and a lower end of an accommodating space between the inner furnace tube and the outer furnace tube are sealed to form a sealed chamber. A plurality of carrier placement positions correspondingly arranged in the sealed chamber by the rotating device can be used for enabling carriers to adjust positions and angles within the sealed chamber.
Claims17
A furnace tube, comprising an outer furnace tube, an inner furnace tube, and a lower furnace door, wherein an upper end and a lower end of an accommodating space between the inner furnace tube and the outer furnace tube are sealed to form a sealed chamber;
- heating sources used for heating the sealed chamber are arranged on the inner furnace tube and the outer furnace tube;
- the furnace tube further comprises a rotating device which is provided with a plurality of carrier placement positions corresponding to the sealed chamber;
- and the rotating device in rotating is capable of driving carriers on the carrier placement positions to adjust positions and angles within the sealed chamber.
A control method for a furnace tube, the furnace tube comprising an outer furnace tube, an inner furnace tube, and a lower furnace door, wherein an upper end and a lower end of an accommodating space between the inner furnace tube and the outer furnace tube are sealed to form a sealed chamber;
- heating sources used for heating the sealed chamber are arranged on the inner furnace tube and the outer furnace tube;
- the furnace tube further comprises a rotating device which is provided with a plurality of carrier placement positions corresponding to the sealed chamber;
- and the rotating device in rotating is capable of driving carriers on the carrier placement positions to adjust positions and angles within the sealed chamber;
- the control method for the furnace tube comprises the following steps:
- opening the lower furnace door;
- conveying the carriers to the carrier placement positions on the rotating device;
- closing the lower furnace door and performing vacuumizing, and adjusting a reaction environment in the sealed chamber;
- and
- controlling the rotating device to drive the carriers on the carrier placement positions to adjust the positions and angles within the sealed chamber.
Dependencies are inferred from the claim text.