Connector for precursor delivery

A connector for a substrate processing system comprising:

• a body comprising:
• a first body portion including an inlet and an outlet and defining a first gas flow channel extending in a first direction between the inlet and the outlet;
• and
• a second body portion including an inlet and defining a second gas flow channel extending in a second direction that is different than the first direction;
• and
• a gas conduit arranged in the first gas flow channel and defining a third gas flow channel extending in the second direction, including an inlet connected to the second gas flow channel, and including a plurality of gas through holes passing through the gas conduit on a downstream side of the gas conduit.

A connector for a substrate processing system comprising:

• a body comprising:
• a first body portion including an inlet and an outlet and defining a first gas flow channel extending in a first direction from the inlet to the outlet;
• and
• a second body portion including an inlet and an outlet and defining a second gas flow channel extending in a second direction that is different than the first direction;
• and
• a cantilevered body portion extending from the second body portion into the first gas flow channel and including:
• an angled body portion extending from the second body portion into the first gas flow channel;
• and
• a third body portion extending from the angled body portion in the first gas flow channel,
• wherein the second gas flow channel extends through the second body portion, the angled body portion and the first body portion, and
• wherein gas flowing through the first gas flow channel is combined with gas flowing through the second gas flow channel at the outlet of the third body portion.