Vacuum pump and stator component
AssigneeEdwards Japan Limited
InventorsYasuhiro Shibata, Kentaro Sato
Life of this patent
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Abstract
A vacuum pump includes a casing, a rotor shaft enclosed in the casing and rotatably supported, a rotor fixed to the rotor shaft and rotated with the rotor shaft, and an annular stator component which exhausts a sucked-in gas in collaboration with the rotor. The stator component has a first part and a second part formed by casting and opposed by sandwiching at least one reducing groove reducing a volume and extending along a circumferential direction of the stator component and a bottom portion which is disposed by containing at least a bottom of the reducing groove and connects the first part and the second part, and the stator component includes a heat-transfer improving structure which improves heat transfer between the first part and the second part.
Claims8
A vacuum pump comprising:
- a housing;
- a rotor shaft enclosed in the housing and rotatably supported;
- a rotor fixed to the rotor shaft and rotated with the rotor shaft;
- and
- an annular stator component which exhausts a sucked-in gas in collaboration with the rotor, wherein
- the stator component has a first part and a second part at least partially formed by casting and disposed by sandwiching at least one reducing groove reducing a volume and extending along a circumferential direction of the stator component and a bottom portion disposed by containing at least a bottom of the reducing groove and connecting the first part and the second part;
- and
- the stator component includes a heat-transfer improving structure which improves heat transfer between the first part and the second part, different from the bottom portion.
A stator component which exhausts a sucked-in gas in collaboration with a rotatable rotor of the vacuum pump, comprising:
- a first part and a second part at least partially formed by casting and disposed by sandwiching at least one reducing groove reducing a volume and extending along a circumferential direction of the stator component and a bottom portion which is disposed by containing at least a bottom of the reducing groove and connects the first part and the second part;
- and
- a heat-transfer improving structure which improves heat transfer between the first part and the second part, different from the bottom portion.
Dependencies are inferred from the claim text.