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US 2026/0265948 A1Published application
Process for producing single crystal-like silver films
AssigneeUniversity of South-Eastern Norway
InventorsKim Robert GUSTAVSEN, Kaiying WANG
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Abstract
The invention relates to a process for deposition of single crystal-like silver thin films on a substrate and corresponding processing unit. The process involves a sputtering method for depositing silver on a substrate using a DC sputtering method, and wherein the process also includes a RF powered boron deposition, the RF and silver deposition being performed simultaneously.
Claims10
A process for deposition of single crystal-like silver thin films on a substrate, comprising:
- depositing silver on a substrate using DC sputtering;
- RF powered boron deposition;
- and
- wherein the above steps are performed simultaneously.
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A processing unit for processing a single crystal-like silver thin film, the processing unit comprising:
- a chamber containing an argon ion atmosphere and a substrate configured to receive the film:
- a silver sputtering target driven by a DC power source;
- and
- a boron sputtering target driven by an RF power source.
1 more element
Dependencies are inferred from the claim text.