Device and method of manufacturing device
AssigneeTazmo Co., Ltd.
InventorYoshinori IKAGAWA
Life of this patent
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Abstract
A method of manufacturing a device is a method of manufacturing a device including a cavity and comprises a joining step and an internal pressure adjusting step. In the joining step, two joining targets are joined to each other, thereby forming the cavity and sealing a gas adsorber in the cavity. The gas adsorber allows gas in the cavity to be adsorbed thereon by application of light. In the internal pressure adjusting step, an internal pressure in the cavity is adjusted by application of the light to the gas adsorber after the joining step.
Claims10
A method of manufacturing a device including a cavity, comprising:
- a joining step that joins two joining targets to each other, thereby forming the cavity and sealing an internal pressure adjusting member in the cavity, the internal pressure adjusting member allowing an internal pressure in the cavity to be adjusted by application of light, the internal pressure adjusting member being at least one of a gas adsorber that allows gas in the cavity to be adsorbed thereon by application of light and a gas generator that allows gas to be generated into the cavity by application of the light;
- and
- an internal pressure adjusting step that adjusts an internal pressure in the cavity by application of the light to the internal pressure adjusting member after the joining step.
(canceled)
(canceled)
A device comprising:
- a cavity composed of two joining targets;
- and
- an internal pressure adjusting member sealed in the cavity and allowing an internal pressure in the cavity to be adjusted by application of light, the internal pressure adjusting member being at least one of a gas adsorber that allows gas in the cavity to be adsorbed thereon by application of light and a gas generator that allows gas to be generated into the cavity by application of light.
(canceled)
Dependencies are inferred from the claim text.