Liquid ejection head substrate and method for manufacturing liquid ejection head substrate
AssigneeCanon Kabushiki Kaisha
InventorsYUKI KOMORI, MANABU OTSUKA, RYOTARO MURAKAMI
Life of this patent
Estimating the term…
Abstract
A liquid ejection head substrate includes a nozzle substrate having a nozzle for ejecting liquid. The nozzle substrate includes a substrate in which the nozzle is formed, a first film provided on a first surface of the substrate on a side from which the liquid is ejected from the nozzle, and a second film provided on a second surface of the substrate opposite to the first surface. A compressive stress or tensile stress similar to a compressive stress or tensile stress generated in the first film is generated in the second film.
Claims20
A liquid ejection head substrate comprising:
- a nozzle substrate including a nozzle for ejecting liquid,
- the nozzle substrate including:
- a substrate in which the nozzle is formed;
- a first film provided on a first surface of the substrate on a side from which the liquid is ejected from the nozzle;
- and
- a second film provided on a second surface of the substrate opposite to the first surface,
- wherein a compressive stress or tensile stress similar to a compressive stress or tensile stress generated in the first film is generated in the second film.
A method of manufacturing a liquid ejection head substrate including a nozzle substrate having a nozzle for ejecting liquid, the method comprising:
- preparing a substrate in which the nozzle is to be formed;
- forming a first film on a first surface of the substrate on a side from which liquid is ejected from the nozzle;
- and
- forming a second film on a second surface of the substrate opposite to the first surface,
- wherein a compressive stress or tensile stress similar to a compressive stress or tensile stress generated in the first film is generated in the second film.
Dependencies are inferred from the claim text.