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AssigneeASML Netherlands B.V.
InventorsStijn Louis Willy LETERME, Aleksa TOPALOVIC, Mohamed Ahmed Abdelalim Hassan ALOSTA, Willem WILLEMSEN, Sebastianus Johannes ARTS
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A method of calibrating a substrate handler, the handler including: a first substrate support and a second substrate support, a first robot arm related to the first substate support, and a second robot arm related to the second substrate support, wherein the first substrate support is provided with a first sensor, the first sensor being an edge sensor for sensing an edge of a substrate, a second sensor arranged at a predetermined distance with respect to the second substrate support, the second sensor being an optical sensor, the method including calibrating the first robot arm and the second robot arm with respect to the first substrate support and the second substrate support using the second sensor.
A method of calibrating a substrate handler, the handler comprising:
A handler system for substrates, the handler comprising:
Dependencies are inferred from the claim text.