Apparatus for transferring substrate in vacuum chamber

A substrate transfer apparatus that transfers a substrate in a vacuum chamber, comprising:

• an elevating robot including:
• (i) an elevating shaft through which an a-th hollow hole is formed, and (ii) an elevation driving unit for moving vertically and rotating the elevating shaft, wherein the elevating robot is sealably coupled with a vacuum chamber through-hole formed in a lower region of the vacuum chamber;
• a travel robot including:
• (i) a b1-st travel link arm, wherein a b1-st driving motor and a b-th speed reducer which is interlocked with the b1-st driving motor to reduce a rotational speed of the b1-st driving motor by half are installed in a sealed inner space of the b1-st travel link arm, wherein a (b1_1)-st driving shaft which is interlocked with the b-th speed reducer and a (b1_1)-st output shaft which is interlocked with the (b1_1)-st driving shaft are sealingly installed on a b1-st one-end area of the b1-st travel link arm, wherein a (b1_1)-st hollow hole is formed through the (b1_1)-st driving shaft, wherein a (b1_2)-nd driving shaft interlocked with the b1-st driving motor and a (b1_2)-nd output shaft interlocked with the (b1_2)-nd driving shaft are sealingly installed on a b1-st opposite-end area of the b1-st travel link arm, wherein a (b1_2)-nd hollow hole is formed through the (b1_2)-nd driving shaft, and wherein the (b1_1)-st output shaft is fixedly coupled with the elevating shaft of the elevating robot, and (ii) a b2-nd travel link arm, wherein a b2-nd driving motor is installed in a sealed inner space of the b2-nd travel link arm, wherein a b2-nd one-end area of the b2-nd travel link arm is fixedly coupled with the (b1_2)-nd output shaft of the b1-st travel link arm, and wherein a b2-nd driving shaft interlocked with the b2-nd driving motor and a b2-nd output shaft interlocked with the b2-nd driving shaft are sealingly installed on a b2-nd opposite-end area of the b2-nd travel link arm, wherein a b2-nd hollow hole is formed through the b2-nd driving shaft;
• and
• a transfer robot including:
• (i) a transfer arm platform, wherein the transfer arm platform has (i-1) a c0-th coupling hole formed at a c-th center area which is a specific area on a center line corresponding to a linear movement direction of the substrate to be transferred, wherein c0-th stopping member, through which a c0-th vertical through-hole corresponding to the b2-nd hollow hole of the b2-nd driving shaft of the b2-nd opposite-end area of the b2-nd travel link arm of the travel robot is formed, compartmentalizes the c0-th coupling hole into a c0-th upper space and a c0-th lower space, wherein the c0-th upper space is sealed by a c0-th cover, (i-2) a c1-st coupling hole formed at a c-th one-end area of a one-side area with respect to the center line, wherein a c1-st stopping member, through which a c1-st vertical through-hole is formed, compartmentalize the c1-st coupling hole into a c1-st upper space and a c1-st lower space which is sealed by a c1-st cover, (i-3) a c2-nd coupling hole formed at a c-th opposite-end area of an opposite-side area with respect to the center line corresponding to the c-th one-end area, wherein a c2-nd stopping member, through which a c2-nd vertical through-hole is formed, compartmentalizes the c2-nd coupling hole into a c2-nd upper space and a c2-nd lower space which is sealed by a c2-nd cover, (i-4) a (1_1)-st blade and a (1_2)-nd blade formed respectively at a forward part and a backward part of the c1-st coupling hole, and (i-5) a (2_1)-st blade and a (2_2)-nd blade formed respectively at the forward part and the backward part of the c2-nd coupling hole, and wherein the b2-nd output shaft of the b2-nd opposite-end area of the b2-nd travel link arm of the travel robot inserted into the c0-th lower space is fixedly coupled with the c0-th stopping member, (ii) a first transfer arm part, wherein the first transfer arm part has a (1_1)-st transfer link arm, a (1_2)-nd transfer link arm, a first common link arm, a (1_1)-st subordinate link arm which is parallel to the (1_1)-st transfer link arm, a (1_2)-nd subordinate link arm which is parallel to the (1_1)-st transfer link arm, a (1_3)-rd subordinate link arm which is parallel to the (1_2)-nd transfer link arm, a (1_4)-th subordinate link arm which is parallel to the first common link arm, and a first end-effector, wherein a c1-st driving motor and a c1-st speed reducer which is interlocked with the c1-st driving motor to reduce a rotational speed of the c1-st driving motor by half are installed in a sealed inner space of the (1_1)-st transfer link arm, wherein a (c1_1)-st driving shaft interlocked with the c1-st speed reducer and a (c1_1)-st output shaft interlocked with the (c1_1)-st driving shaft are sealingly installed on a (c1_1)-st one-end area of the (1_1)-st transfer link arm, wherein a (c1_1)-st hollow hole is formed through the (c1_1)-st driving shaft, wherein a (c1_2)-nd driving shaft interlocked with the c1-st driving motor and a (c1_2)-nd output shaft interlocked with the (c1_2)-nd driving shaft are sealingly installed on a (c1_1)-st opposite-end area of the (1_1)-st transfer link arm, wherein a (c1_2)-nd hollow hole is formed through the(c1_2)-nd driving shaft, wherein the (c1_1)-st output shaft of the (1_1)-st transfer link arm is fixedly coupled with a c1-st linking member that is inserted into the c1-st upper space of the transfer arm platform to be fixedly coupled with the c1-st stopping member, wherein a (c1_2)-nd one-end area of the (1_2)-nd transfer link arm is fixedly coupled with the (c1-2)-nd output shaft of the (1_1)-st transfer link arm through a first fixed coupling shaft, wherein a c1-st center area of the first common link arm is rotatably coupled with the first fixed coupling shaft, wherein a (c1_4)-th one-end area of the (1_1)-st subordinate link arm is rotatably coupled with the (1_1)-st blade of the transfer arm platform and a (c1_4)-th opposite-end area of the (1_1)-st subordinate link arm is rotatably coupled with a (c1_3)-rd one-end area of the first common link arm, wherein a (c1_5)-th one-end area of the (1_2)-nd subordinate link arm is rotatably coupled with the (1_2)-nd blade of the transform arm platform and a (c1_5)-th opposite-end area of the (1_2)-nd subordinate link arm is rotatably coupled with a (c1_3)-rd opposite-end area of the first common link arm, wherein (c1_6)-th one-end area of the (1_3)-rd subordinate link arm is rotatably coupled with a (c1_3)-rd opposite-end area of the first common link arm, wherein a (c1_7)-th one-end area of the (1_4)-th subordinate link arm is rotatably coupled with a (c1_6)-th opposite-end area of the (1_3)-rd subordinate link arm and a (c1_7)-th opposite-end area of the (1_4)-th subordinate link arm is rotatably coupled with the (c1_2)-nd opposite-end area of the (1_2)-nd transfer link arm, and wherein the first end-effector is fixed to the (c1_7)-th opposite-end area of the (1_4)-th subordinate link arm to thereby support the substrate, and (iii) a second transfer arm part, wherein the second transfer arm part has a (2_1)-st transfer link arm, a (2_2)-nd transfer link arm, a second common link arm, a (2_1)-st subordinate link arm which is parallel to the (2_1)-st transfer link arm, a (2_2)-nd subordinate link arm which is parallel to the (2_1)-st transfer link arm, a (2_3)-rd subordinate link arm which is parallel to the (2_2)-nd transfer link arm, a (2_4)-th subordinate link arm which is parallel to the second common link arm, and a second end-effector, wherein a c2-nd driving motor and a c2-nd speed reducer which is interlocked with the c2-nd driving motor to reduce a rotational speed of the c2-nd driving motor by half are installed in a sealed inner space of the (2_1)-st transfer link arm, wherein a (c2_1)-st driving shaft interlocked with the c2-nd speed reducer and a (c2_1)-st output shaft interlocked with the (c2_1)-st driving shaft are sealingly installed on a (c2_1)-st one-end area of the (2_1)-st transfer link arm, wherein a (c2_1)-st hollow hole is formed through the (c2_1)-st driving shaft, wherein a (c2_2)-nd driving shaft interlocked with the c2-nd driving motor and a (c2_2)-nd output shaft interlocked with the (c2_2)-nd driving shaft are sealingly installed on a (c2_1)-st opposite-end area of the (2_1)-st transfer link arm, wherein a (c2_2)-nd hollow hole is formed through the (c2_2)-nd driving shaft, wherein the (c2_1)-st output shaft of the (2_1)-st transfer link arm is fixedly coupled with a c2-nd linking member that is inserted into the c2-nd upper space of the transfer arm platform to be fixedly coupled with the c2-nd stopping member, wherein a (c2_2)-nd one-end area of the (2_2)-nd transfer link arm is fixedly coupled with the (c2-2)-nd output shaft of the (2_1)-st transfer link arm through a second fixed coupling shaft, wherein a c2-nd center area of the second common link arm is rotatably coupled with the second fixed coupling shaft, wherein a (c2_4)-th one-end area of the (2_1)-st subordinate link arm is rotatably coupled with the (2_1)-st blade of the transfer arm platform and a (c2_4)-th opposite-end area of the (2_1)-st subordinate link arm is rotatably coupled with a (c2_3)-rd one-end area of the second common link arm, wherein a (c2_5)-th one-end area of the (2_2)-nd subordinate link arm is rotatably coupled with the (2_2)-nd blade of the transform arm platform and a (c2_5)-th opposite-end area of the (2_2)-nd subordinate link arm is rotatably coupled with a (c2_3)-rd opposite-end area of the second common link arm, wherein (c2_6)-th one-end area of the (2_3)-rd subordinate link arm is rotatably coupled with a (c2_3)-rd opposite-end area of the second common link arm, wherein a (c2_7)-th one-end area of the (2_4)-th subordinate link arm is rotatably coupled with a (c2_6)-th opposite-end area of the (2_3)-rd subordinate link arm and a (c2_7)-th opposite-end area of the (2_4)-th subordinate link arm is rotatably coupled with the (c2_2)-nd opposite-end area of the (2_2)-nd transfer link arm, and wherein the second end-effector is fixed to the (c2_7)-th opposite-end area of the (2_4)-th subordinate link arm to thereby support the substrate.