Laser processing apparatus and method for manufacturing laser-processed product [as amended]
AssigneeTowa Corporation
InventorsTakuya MOGAMI, Hiroki OKAWA, Takayuki MIHARA
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AssigneeTowa Corporation
InventorsTakuya MOGAMI, Hiroki OKAWA, Takayuki MIHARA
Estimating the term…
A laser processing apparatus capable of laser processing while efficiently aspirating dust is obtained. The laser processing apparatus comprises: a stage; an outer peripheral wall portion disposed so that a hollow space extends from a side closer to the stage toward a side farther therefrom; a cylindrical wall portion that sectionalizes the hollow space into an inner space and an outer space; an irradiation unit that emits laser light o pass through the inner space to irradiate a workpiece; a transparent member provided to close the inner space; and a lid member having a first opening and disposed to close the outer space between the cylindrical wall portion and the outer peripheral wall portion, and the cylindrical wall portion has a second opening at a position on the side closer to the stage than the transparent member is.
A laser processing apparatus that applies laser processing to a workpiece, comprising:
Dependencies are inferred from the claim text.