Suction device and laser device
OwnerArmin KRAUS, André LANGE +1inventors
InventorsArmin KRAUS, André LANGE, Michael GERGEN
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OwnerArmin KRAUS, André LANGE +1inventors
InventorsArmin KRAUS, André LANGE, Michael GERGEN
Estimating the term…
Disclosed is a suction device comprising: an air guiding device and a flow inlet for generating a suction flow through the air guiding device into the flow inlet. The air guiding device is configured is such that a projection of the air guiding device onto a surface of an imaginary sphere covers at least 30% of the surface. Herein, the projection is in a radial direction from a center point of the imaginary sphere to the surface of the imaginary sphere, wherein the center point of the imaginary sphere is arranged in a center of the flow inlet. A radius of the imaginary sphere is selected to be so large that the imaginary sphere completely encloses the air guiding device. The air guiding device comprises a first opening which, in operation, faces a processing location on a substrate and a second opening through which a laser radiation can be emitted through the air guiding device and through the first opening. Further disclosed is a laser device comprising the suction device and a laser emitting device.
-32. (canceled)
A suction device comprising:
A laser device comprising:
A suction device for sucking off process residues arising in the processing of the substrate surface, the suction device comprising:
Dependencies are inferred from the claim text.