Substrate processing apparatus
AssigneeSCREEN Holdings Co., Ltd.
InventorKoji NISHIYAMA
Life of this patent
Estimating the term…
Abstract
A substrate processing apparatus includes a substrate holder, nozzles, pipes, a nozzle holder, an arm, and an arm drive section. The nozzle holder holds any one nozzle of the nozzles. The arm is coupled to the nozzle holder. The arm drive section moves the arm. The arm drive section moves the nozzle held by the nozzle holder. Each of the nozzles includes a dispensing port and a connection portion. Each of the pipes includes a downstream end portion. Each of the pipes has flexibility. The nozzle held by the nozzle holder is defined as a selection nozzle. The arm drive section moves the dispensing port of the selection nozzle to a processing position. The selection nozzle is rotatable about a rotation axis with respect to the arm. The rotation axis passes through the dispensing port of the selection nozzle.
Claims20
A substrate processing apparatus comprising:
- a first substrate holder configured to hold a substrate in a horizontal attitude;
- a plurality of nozzles configured to dispense a processing solution;
- a plurality of pipes connected to the nozzles;
- a nozzle holder configured to hold any one nozzle of the nozzles;
- an arm coupled to the nozzle holder;
- and
- an arm drive section configured to move the arm to move the nozzle held by the nozzle holder,
- wherein each of the nozzles includes:
- a dispensing port configured to dispense a processing solution;
- and
- a connection portion connected to the pipes,
- each of the pipes includes
- a downstream end portion connected to the connection portion,
- each of the pipes has flexibility,
- the nozzle held by the nozzle holder is defined as a selection nozzle,
- the arm drive section moves the dispensing port of the selection nozzle to a first processing position for dispensing a processing solution to a substrate held by the first substrate holder,
- the selection nozzle is rotatable about a rotation axis with respect to the arm, and
- the rotation axis passes through the dispensing port of the selection nozzle.
Dependencies are inferred from the claim text.