SYSTEM AND METHOD FOR TREATING AIR CONTAINING VOLATILE ORGANIC COMPOUNDS (VOCs)
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Ming TSAO, Chieh Pu LAI
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Ming TSAO, Chieh Pu LAI
Estimating the term…
A system and method for treating air containing volatile organic compounds (VOCs). The system includes a concentrator, a thermal incinerator, and a catalytic filtration system. The concentrator removes the VOCs from the air to form treated air and concentrated VOC air. The concentrated VOC air is mixed with fuel to form a fuel/air mixture that is combusted by the thermal incinerator to form incinerator exhaust air, which is cooled to form cooled incinerator exhaust air. In the catalytic filtration system, ozone and/or reactive oxygen species (ROS) are generated and injected into the cooled incinerator exhaust air. Particulate matter is removed from the cooled incinerator exhaust air by one or more filters. Using one or more catalysts, NOx in the cooled incinerator exhaust air containing the ozone and/or ROS is converted into nitrogen oxides of the formula NxOy, where x and y are each 2 or greater.
A system for treating air containing volatile organic compounds (VOCs), the system comprising:
A system for treating air containing volatile organic compounds (VOCs), the system comprising:
A method for treating air containing volatile organic compounds (VOCs), the method comprising:
Dependencies are inferred from the claim text.