Electrostatic chuck

Abstract

An electrostatic chuck in which electrical connection between an internal electrode and a feed terminal can be easily achieved is provided. An electrostatic chuck 10 includes a dielectric substrate 100, an RF electrode 140 provided inside the dielectric substrate 100, a feed terminal 170 arranged on an inner side of a recessed section 160 which is formed on a surface 120 opposite to a placement surface in the dielectric substrate 100, and a connection section 190 configured to electrically connect the RF electrode 140 with the feed terminal 170. In this electrostatic chuck 10, a distance T from a bottom 161 of the recessed section 160 to the RF electrode 140 is larger than 0.05 mm.

Dependencies are inferred from the claim text.