Light detection device, method for manufacturing the same, and electronic device
AssigneeSony Semiconductor Solutions Corporation
InventorSHOTA KITAMURA
Life of this patent
Estimating the term…
Abstract
Provided is a light detection device in which a transistor has an oxide film at the fin bottom in a bulk substrate without using an SOI substrate. The light detection device includes a first substrate portion and a second substrate portion. The first substrate portion has pixels that photoelectrically convert incident light. The second substrate portion is joined to a surface of the first substrate portion opposite to a surface on which the light is incident. Furthermore, the second substrate portion has a plurality of elements constituting a readout circuit configured to output a pixel signal based on charges output from the pixels. A pattern of an insulating film is formed on a bonding surface of the second substrate portion to the first substrate portion.
Claims13
A light detection device comprising:
- a first substrate portion having pixels that photoelectrically convert incident light;
- and
- a second substrate portion that is joined to a surface of the first substrate portion opposite to a surface on which the light is incident and has a plurality of elements constituting a readout circuit configured to output a pixel signal based on charges output from the pixels, wherein
- a pattern of an insulating film is formed on a bonding surface of the second substrate portion to the first substrate portion.
A method for manufacturing a light detection device, the method comprising:
- preparing a first substrate portion having pixels that photoelectrically convert incident light and a second substrate portion having a plurality of elements constituting a readout circuit configured to output a pixel signal based on charges output from the pixels;
- forming a pattern of an insulating film on a bonding surface of the second substrate portion to the first substrate portion;
- and
- joining the first substrate portion and the second substrate portion after forming the pattern of the insulating film.
An electronic device comprising a light detection device including:
- a first substrate portion having pixels that photoelectrically convert incident light;
- and
- a second substrate portion that is joined to a surface of the first substrate portion opposite to a surface on which the light is incident and has a plurality of elements constituting a readout circuit configured to output a pixel signal based on charges output from the pixels, wherein
- a pattern of an insulating film is formed on a bonding surface of the second substrate portion to the first substrate portion.
Dependencies are inferred from the claim text.