Vertical-cavity light-emitting element
AssigneeStanley Electric Co., Ltd.
InventorMasaru KURAMOTO
Life of this patent
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Abstract
A vertical-cavity light-emitting element includes a substrate, first and second multilayer reflectors, a semiconductor structure, and a metal oxide film. The first multilayer reflector is on the substrate. The semiconductor structure includes a first semiconductor layer of one conductivity type, a light-emitting layer, and a second semiconductor layer of opposite conductivity type. The metal oxide film is translucent and formed on the second semiconductor layer, covering a central region and partially extending to a peripheral edge, where it is insulated. The metal oxide film is electrically connected only at the central region. The second multilayer reflector covers this region, forming a resonator with the first multilayer reflector.
Claims9
A vertical-cavity light-emitting element comprising:
- a substrate;
- a first multilayer reflector formed on the substrate;
- a semiconductor structure layer including a first semiconductor layer having a first conductivity type formed on the first multilayer reflector, a light-emitting layer formed on the first semiconductor layer, a second semiconductor layer formed on the light-emitting layer and having a second conductivity type opposite of the first conductivity type;
- a metal oxide film having a translucency that is formed on the second semiconductor layer, covers one region at a center of an upper surface of the second semiconductor layer, is electrically connected to the second semiconductor layer in the one region, is partially formed on a peripheral edge region on a peripheral edge of the one region, and is insulated from a surface of the second semiconductor layer in the peripheral edge region;
- and
- a second multilayer reflector formed to cover the one region on the semiconductor structure layer and constituting a resonator between the first multilayer reflector and the second multilayer reflector.
Dependencies are inferred from the claim text.