Endpoint detection using spectral or temporal pattern matching
AssigneeLam Research Corporation
InventorsJindoo CHOI, Jeffrey D. BONDE, Jorge LUQUE
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Abstract
An endpoint detection system to detect an endpoint of treatment of a substrate in a processing chamber includes a first sensor configured to generate a first plurality of signals in response to one of an intensity of plasma light within a processing chamber, reflectometry from a surface of a substrate in the processing chamber, and absorption of process gases or byproducts evacuated from the processing chamber. A controller is configured to calculate a first plurality of correlation coefficients in response to the first plurality of signals, respectively, and a reference signal and detect an endpoint of the treatment in response to the first plurality of correlation coefficients.
Claims28
An endpoint detection system to detect an endpoint of treatment of a substrate in a processing chamber, comprising:
- a first sensor configured to generate a first plurality of signals in response to one of an intensity of plasma light within a processing chamber, reflectometry from a surface of a substrate in the processing chamber, and absorption of process gases or byproducts evacuated from the processing chamber;
- and
- a controller configured to:
- calculate a first plurality of correlation coefficients in response to the first plurality of signals, respectively, and a reference signal;
- and
- detect an endpoint of the treatment in response to the first plurality of correlation coefficients.
A method for detecting an endpoint of a treatment of a substrate in a processing chamber, comprising:
- generating a first plurality of signals in response to one of optical intensity of process gases within the processing chamber, reflectometry from a surface of a substrate in the processing chamber, and absorption of process gases evacuated from the processing chamber;
- calculating a first plurality of correlation coefficients in response to the first plurality of signals, respectively, and a reference signal;
- and
- detecting an endpoint of the treatment in response to the first plurality of correlation coefficients.
Dependencies are inferred from the claim text.