US 2026/0260845 A1Published application

Charged Particle Beam Device

AssigneeHitachi High-Tech Corporation

InventorsTakashi KUBO, Minoru SAKAMAKI, Hiroshi MORITA

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Abstract

An object of the present invention is to provide a charged particle beam device that includes an electrode short-circuit mechanism capable of suppressing a change in a lens effect generated between acceleration electrodes during a change in acceleration voltage and is operable while applying an acceleration voltage to the electrode short-circuit mechanism. In the charged particle beam device according to the present invention, while applying an acceleration voltage to a first acceleration electrode, a potential difference between a short-circuit electrode and a first multi-stage acceleration electrode is controlled such that discharge does not occur, and the first multi-stage acceleration electrode and the short-circuit electrode that have the above-described potential difference are connected to each other (refer to FIG. 1).

Claims10

Dependent claims

A charged particle beam device that irradiates a sample with a charged particle beam, the device comprising:

a charged particle source configured to emit the charged particle beam;
a first acceleration electrode to which a first acceleration voltage for accelerating the charged particle beam is applied;
a multi-stage acceleration electrode group disposed between a stage on which the sample is placed and the first acceleration electrode;
a short-circuit electrode configured to connect a first multi-stage acceleration electrode in the multi-stage acceleration electrode group to a reference potential;
and
a control unit configured to control a potential of the first acceleration electrode and a potential of the multi-stage acceleration electrode group, wherein
while applying an acceleration voltage to the charged particle source, the control unit controls a potential difference between the short-circuit electrode and the first multi-stage acceleration electrode to a value where discharge does not occur, and
after connecting the first multi-stage acceleration electrode and the short-circuit electrode that have the potential difference of the value to each other, the control unit controls the potential of the first multi-stage acceleration electrode to the reference potential.

5 more elements

Dependencies are inferred from the claim text.