Optical beam delivery system including micro-optical bench mounted within vacuum chamber for direct beam delivery

Abstract

An optical beam delivery system is provided. The optical beam delivery system includes one or more micro-optical benches (MOBs). Each MOB of the one or more MOBs includes a substrate, and a plurality of signal manipulation elements. Each signal manipulation element of the plurality of signal manipulation elements is disposed on or in the substrate. The plurality of signal manipulation elements are configured to provide an array of optical beams directly to an array of target locations. For example, the optical beams propagate through free space from the signal manipulation elements to the respective target locations without interacting with any additional optical elements, in various embodiments.

Dependencies are inferred from the claim text.