Optical system for guiding illumination and imaging light from a light source to an image field

An optical system configured to guide illumination and imaging light from a light source to an image field in which a substrate is arrangeable, the optical system configured to illuminate an object field in which an object is arrangeable and/or to image the object field into the image field, the optical system comprising:

• an optical assembly configured to guide the illumination and the imaging light along a beam path between the light source and the image field via a field plane and via a pupil plane,
• wherein:
• the light source and/or a chromatic filter are downstream of the light source in the beam path;
• the light source and/or the chromatic filter are configured to specify a wavelength bandwidth for the imaging light;
• the wavelength bandwidth is between a total wavelength bandwidth and a reduction wavelength bandwidth;
• the reduction wavelength bandwidth is at least 10% less than the total wavelength bandwidth;
• and
• the chromatic filter and/or the light source are/is in a region of the field plane.

An optical system configured to guide illumination and imaging light from a light source to an image field in which a substrate is arrangeable, the optical system configured to illuminate an object field in which an object is arrangeable and/or to image the object field into the image field, the optical system comprising:

• an optical assembly configured to guide the illumination and the imaging light along a beam path between the light source and the image field via a field plane and via a pupil plane,
• wherein:
• the light source and/or a chromatic filter are downstream of the light source in the beam path;
• the light source and/or the chromatic filter are configured to specify a wavelength bandwidth for the imaging light;
• the wavelength bandwidth is between a total wavelength bandwidth and a reduction wavelength bandwidth;
• the reduction wavelength bandwidth is at least 10% less than the total wavelength bandwidth;
• the chromatic filter is arranged in an imaging optical unit of the optical system;
• and
• the imaging optical unit is configured to image the object field into the image field.