Semiconductor device and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorSeunghoon HAN
Life of this patent
Estimating the term…
Loading patent…
AssigneeSamsung Electronics Co., Ltd.
InventorSeunghoon HAN
Estimating the term…
A semiconductor device may include: a semiconductor substrate; a first stacked structure on the semiconductor substrate in a first direction, the first stacked structure including first material layers and second material layers that are alternately arranged in the first direction, the first material layers and the second material layers having different refractive indices from each other, and wherein the first stacked structure includes first through holes extending through the first material layers and the second material layers in the first direction; and a first anti-reflective layer on the first stacked structure in the first direction, the first anti-reflective layer including a first anti-reflective material, and wherein the first anti-reflective layer includes first pattern holes respectively in communication with the first through holes of the first stacked structure, wherein a light reflectance of the first anti-reflective layer is 25% or less.
A semiconductor device comprising:
A semiconductor device comprising:
A method of manufacturing a semiconductor device, the method comprising:
Dependencies are inferred from the claim text.