Carrier, inspection system, and inspection method

An inspection system configured to inspect a plurality of electronic devices, the inspection system comprising:

• a carrier configured to collectively support the plurality of electronic devices that are divided, and
• a probe card including a plurality of probes configured to contact the plurality of electronic devices supported by the carrier, wherein
• the carrier includes
• a base having a flat-plate shape, and
• a plurality of base dies that are disposed on one surface of the base and to which the plurality of electronic devices are to be separably fixed, and
• the base and the plurality of base dies include a material including at least one of silicon or carbon.

An inspection method of inspecting a plurality of electronic devices in a carrier configured to collectively support the plurality of electronic devices that are divided, the inspection method comprising:

• fixing the plurality of electronic devices to a plurality of base dies, and
• contacting a plurality of probes of a probe card with the plurality of electronic devices supported by the carrier, thereby inspecting the plurality of electronic devices, wherein
• the carrier includes
• a base having a flat-plate shape, and
• the plurality of base dies that are disposed on one surface of the base and to which the plurality of electronic devices are to be separably fixed, and
• the base and the plurality of base dies include a material including at least one of silicon or carbon.