Vibration-Type Angular Velocity Sensor
AssigneeSumitomo Precision Products Co., Ltd.
InventorMario KIUCHI
Life of this patent
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Abstract
A vibration-type angular velocity sensor 100 according to this invention includes a vibrator 10 including a substrate 1 including a first silicon layer 11 including a crystal plane with Miller indices (111) and a second silicon layer 13 including a crystal plane with Miller indices (100), and a vibration exciter 2 including a piezoelectric layer 21 arranged on a side of the second silicon layer 13 of the substrate 1 opposite to the first silicon layer 11 side. The piezoelectric layer 2 includes a piezoelectric element material that includes at least a crystal plane with Miller indices (100) or Miller indices (001) and is grown on the side of the second silicon layer 13 opposite to the first silicon layer 11.
Claims10
A vibration-type angular velocity sensor comprising:
- a vibrator including a substrate including a first silicon layer including a crystal plane with Miller indices (111) and a second silicon layer arranged on one side in a thickness direction of the first silicon layer and including a crystal plane with Miller indices (100), and a vibration exciter including a piezoelectric layer arranged on a side of the second silicon layer of the substrate opposite to the first silicon layer side, wherein
- the piezoelectric layer includes a piezoelectric element material that includes at least a crystal plane with Miller indices (100) or Miller indices (001) and is grown on the side of the second silicon layer opposite to the first silicon layer side.
Dependencies are inferred from the claim text.