Sample measurement device

A sample measurement device comprising:

• a light source configured to irradiate a sample including an insulating film with light having a plurality of wavelengths;
• an excitation source configured to irradiate the sample with a primary beam to emit a charged particle;
• a detector configured to apply at least one of an electric field or a magnetic field to the charged particle to separate a trajectory according to energy of the charged particle, thereby outputting a detection signal depending on the energy of the charged particle;
• and
• a control device configured to process a detection signal of the charged particle obtained from the detector, wherein
• the control device
• generates a comparison signal indicating a comparison result of detection signals detected by the detector under different irradiation conditions of the light, for each of different wavelengths of the light, and
• outputs information on the film quality of the insulating film based on the comparison signal.

A sample measurement device comprising:

• a light source configured to irradiate a sample including an insulating film with light;
• an excitation source configured to irradiate the sample with a primary beam to emit a charged particle;
• a detector configured to apply at least one of an electric field or a magnetic field to the charged particle to separate a trajectory according to energy of the charged particle, thereby outputting a detection signal depending on the energy of the charged particle;
• and
• a control device configured to process a detection signal of the charged particle obtained from the detector, wherein
• the control device
• changes a light irradiation condition, and acquires detection signals by the detector under different irradiation conditions, and
• determines a material characteristic value of the insulating film based on the detection signals under the different irradiation conditions using information indicating a relationship between the detection signal and the material characteristic value, and outputs the material characteristic value.