US 2026/0259151 A1Published application

Inspection device

AssigneesMitsubishi Heavy Industries, Ltd., Riken

InventorsKeisuke KAJIKAWA, Jun YASUI, Soki AKUTSU, Hiroaki MINAMIDE

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Abstract

An inspection device is a device for inspecting an inner peripheral surface of an inspection target having a cylindrical shape. The device includes: an inspection part for emitting a terahertz wave to the inner peripheral surface and detecting a reflection wave of the terahertz wave; and a distance measurement part for measuring a distance between the inspection part and the inner peripheral surface. The inspection part and the distance measurement part are rotated along a circumferential direction of the inspection target. The axial-directional position of the inspection part relative to the inspection target is adjusted. The position of the inspection part on a plane which intersects with an axial direction of the inspection target is adjustable. The position adjustment mechanism is controlled such that a rotational center of the rotation part is positioned on a center axis of the inspection target on the basis of a measurement result of the distance measurement part.

Claims9

Dependent claims

An inspection device for inspecting an inner peripheral surface of an inspection target having a cylindrical shape, the inspection device comprising:

an inspection part for emitting a terahertz wave to the inner peripheral surface and detecting a reflection wave of the terahertz wave;
a distance measurement part for measuring a distance between the inspection part and the inner peripheral surface;
a rotation part for rotating the inspection part and the distance measurement part along a circumferential direction of the inspection target;
a position adjustment mechanism for adjusting a position of the inspection part on a plane which intersects with an axial direction of the inspection target;
and
an axial-direction position adjustment part for adjusting an axial-direction position of the inspection part relative to the inspection target,
wherein the position adjustment mechanism is configured to be controlled such that a rotational center of the rotation part is positioned on a center axis of the inspection target on the basis of a measurement result of the distance measurement part.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 19/491,235Filed 9 Jul 2024
Priority: JP 2023-13949030 Aug 2023
Published: 3 Sep 2026
Term ends: Not estimatedThe source records don’t support an estimate.

Classification12 codes

G01N 21/954
Characterised by the material or shape of the object to be examined: inspecting the inner surface of hollow bodies, e.g. bores
G01B 11/026
For measuring length, width or thickness: by measuring distance between sensor and object
G01B 15/04
Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma…
G01N 21/01
Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light:…