Optical analysis device
AssigneeEbara Jitsugyo Co., Ltd.
InventorTakashi NOGUCHI
Life of this patent
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AssigneeEbara Jitsugyo Co., Ltd.
InventorTakashi NOGUCHI
Estimating the term…
An optical analysis device includes: a measuring cell in a gas supply line; a semiconductor light source apart from the measuring cell; a drive unit; a distributor branching light from the semiconductor light source into transmitted light radiating a substance to be measured in the measuring cell and incident light not passing through the measuring cell; a transmitted light detector detecting the transmitted light, an incident light detector detecting the incident light, a temperature measuring element measuring a state temperature of the semiconductor light source; a drive unit driving and lighting the semiconductor light source; and a control unit. The optical analysis device pre-stores a characteristic coefficient of the semiconductor light source in a memory, computes the absorptivity of the substance during measurement in a computing unit by using detected temperature of the semiconductor light source from the temperature measuring element, and calculates a concentration of the substance by absorptiometry.
1-12. (canceled)
An optical analysis device, comprising:
An optical analysis device, comprising:
Dependencies are inferred from the claim text.