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AssigneeSCREEN Holdings Co., Ltd.
InventorsSyuhei YOSHIMOTO, Toshiki MATSUMOTO, Natsushi SAWADA, Koki ISETANI, Katsuhide KONISHI, Kazuhiko ASADA
Estimating the term…
This invention is relates to an optical apparatus for inspecting an optical integrated circuit. The optical apparatus includes a light source which emits light, an illumination optical unit which is configured to shape the light emitted from the light source into a predetermined shape, a modulator which includes a spatial light modulator on which the light shaped by the illumination optical unit is incident, the modulator emitting modulated light having a predetermined pattern shape by modulating incident light by the spatial light modulator and, and a light guide which guides the modulated light to an input end of an optical waveguide provided in the optical integrated circuit. A time required for an alignment processing can be largely shortened.
An optical apparatus for inspecting an optical integrated circuit, the optical apparatus comprising:
An alignment method for inspecting characteristics of an optical waveguide provided in an optical integrated circuit, the alignment method comprising:
Dependencies are inferred from the claim text.