Method for sensor calibration and method for sensor operation, and pressure sensor

A method for sensor operation of a pressure sensor for measuring a fluid pressure, comprising the following steps:

• providing the pressure sensor which includes at least one sensor element which provides a sensor signal depending on the fluid pressure and has a transverse sensitivity to an acceleration;
• measuring a sensor signal when fluid pressure is applied to the pressure sensor;
• retrieving the calibration value calculated by a method for sensor calibration;
• and
• calculating a compensated sensor signal at least depending on the sensor signal and the calibration value;
• wherein the method for sensor calibration includes:
• providing an acceleration actuator which can apply acceleration to the pressure sensor,
• providing an accelerometer that measures the acceleration and provides an acceleration signal depending on the acceleration,
• during operation of the pressure sensor, performing a calibration procedure including:
• applying acceleration generated by the acceleration actuator to the pressure sensor, and thereby both detecting an acceleration quantity of the acceleration signal and detecting a measured quantity of the sensor signal, and
• subsequently calculating a calibration value depending on the acceleration quantity and the measured quantity.

A pressure sensor for detecting a fluid pressure and configured to be calibrated during operation by a method for sensor calibration, the method comprising the following steps:

• providing the pressure sensor which includes at least one sensor element which provides a sensor signal depending on the fluid pressure and has a transverse sensitivity to an acceleration;
• providing an acceleration actuator which can apply acceleration to the pressure sensor;
• providing an accelerometer that measures the acceleration and provides an acceleration signal depending on the acceleration;
• during operation of the pressure sensor, performing a calibration procedure including:
• applying acceleration generated by the acceleration actuator to the pressure sensor, and thereby both detecting an acceleration quantity of the acceleration signal and detecting a measured quantity of the sensor signal, and
• subsequently calculating a calibration value depending on the acceleration quantity and the measured quantity.