Sensor module and measurement system
AssigneeNihon Dempa Kogyo Co., Ltd.
InventorsNaoki ONISHI, Hiroyuki KUKITA
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AssigneeNihon Dempa Kogyo Co., Ltd.
InventorsNaoki ONISHI, Hiroyuki KUKITA
Estimating the term…
This sensor module comprises a first piezoelectric vibrator having a first electrode, a second piezoelectric vibrator having a second electrode, an electrode cover covering one of the first electrode and the second electrode, an oscillation circuit for causing the first piezoelectric vibrator and the second piezoelectric vibrator to oscillate, and a storage circuit for storing initial oscillation frequency information relating to both the first piezoelectric vibrator and a second oscillation frequency, wherein, when at least the piezoelectric vibrator, among the first piezoelectric vibrator and the second piezoelectric vibrator, of which the electrode is not covered by the electrode cover is driven by the oscillation circuit, the piezoelectric vibrator oscillates at a frequency corresponding to the thickness of a deposit accumulated on the surface of the electrode that is exposed without being covered by the electrode cover.
A sensor module comprising:
Dependencies are inferred from the claim text.